
An automatic topographical surface reconstruction in the SEM
Author(s) -
Lebiedzik J.
Publication year - 1979
Publication title -
scanning
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.359
H-Index - 47
eISSN - 1932-8745
pISSN - 0161-0457
DOI - 10.1002/sca.4950020405
Subject(s) - citation , computer science , state (computer science) , library science , information retrieval , world wide web , algorithm