Open AccessA dynamic scanning method based on signal‐statistics for scanning electron microscopy
Author(s) -
Timischl F.
Publication year - 2013
Publication title -
scanning
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.359
H-Index - 47
eISSN - 1932-8745
pISSN - 0161-0457
DOI - 10.1002/sca.21110
Subject(s) - scanning electron microscope , signal (programming language) , noise (video) , detector , image (mathematics) , standard deviation , optics , noise reduction , image quality , computer science , materials science , artificial intelligence , mathematics , physics , statistics , programming language
Summary A novel dynamic scanning method for noise reduction in scanning electron microscopy and related applications is presented. The scanning method dynamically adjusts the scanning speed of the electron beam depending on the statistical behavior of the detector signal and gives SEM images with uniform and predefined standard deviation, independent of the signal value itself. In the case of partially saturated images, the proposed method decreases image acquisition time without sacrificing image quality. The effectiveness of the proposed method is shown and compared to the conventional scanning method and median filtering using numerical simulations. SCANNING 36:317–326, 2014. © 2013 Wiley Periodicals, Inc.