Monte Carlo simulation of secondary electron images for real sample structures in scanning electron microscopy | Zendy

Zhang P. | Zendy; Wang H. Y. | Zendy; Li Y. G. | Zendy; Mao S. F. | Zendy; Ding Z. J. | Zendy

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Monte Carlo simulation of secondary electron images for real sample structures in scanning electron microscopy

Author(s) -

Zhang P.,

Wang H. Y.,

Li Y. G.,

Mao S. F.,

Ding Z. J.

Publication year - 2011

Publication title -

scanning

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.359

H-Index - 47

eISSN - 1932-8745

pISSN - 0161-0457

DOI - 10.1002/sca.20288

Subject(s) - monte carlo method , scanning electron microscope , sample (material) , secondary electrons , electron , geometry , optics , computer science , materials science , physics , chemistry , mathematics , chromatography , quantum mechanics , statistics

Monte Carlo simulation methods for the study of electron beam interaction with solids have been mostly concerned with specimens of simple geometry. In this article, we propose a simulation algorithm for treating arbitrary complex structures in a real sample. The method is based on a finite element triangular mesh modeling of sample geometry and a space subdivision for accelerating simulation. Simulation of secondary electron image in scanning electron microscopy has been performed for gold particles on a carbon substrate. Comparison of the simulation result with an experiment image confirms that this method is effective to model complex morphology of a real sample. SCANNING 34: 145–150, 2012. © 2011 Wiley Periodicals, Inc.

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