Open AccessMonte Carlo simulation of secondary electron images for real sample structures in scanning electron microscopy
Author(s) -
Zhang P.,
Wang H. Y.,
Li Y. G.,
Mao S. F.,
Ding Z. J.
Publication year - 2011
Publication title -
scanning
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.359
H-Index - 47
eISSN - 1932-8745
pISSN - 0161-0457
DOI - 10.1002/sca.20288
Subject(s) - monte carlo method , scanning electron microscope , sample (material) , secondary electrons , electron , geometry , optics , computer science , materials science , physics , chemistry , mathematics , chromatography , quantum mechanics , statistics
Abstract Monte Carlo simulation methods for the study of electron beam interaction with solids have been mostly concerned with specimens of simple geometry. In this article, we propose a simulation algorithm for treating arbitrary complex structures in a real sample. The method is based on a finite element triangular mesh modeling of sample geometry and a space subdivision for accelerating simulation. Simulation of secondary electron image in scanning electron microscopy has been performed for gold particles on a carbon substrate. Comparison of the simulation result with an experiment image confirms that this method is effective to model complex morphology of a real sample. SCANNING 34: 145–150, 2012. © 2011 Wiley Periodicals, Inc.