Open AccessMonte Carlo modeling of cathodoluminescence generation using electron energy loss curves
Author(s) -
Toth M.,
Phillips M. R.
Publication year - 1998
Publication title -
scanning
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.359
H-Index - 47
eISSN - 1932-8745
pISSN - 0161-0457
DOI - 10.1002/sca.1998.4950200601
Subject(s) - cathodoluminescence , monte carlo method , electron , materials science , cathode ray , penetration depth , range (aeronautics) , computational physics , atomic physics , molecular physics , optics , physics , optoelectronics , nuclear physics , statistics , mathematics , luminescence , composite material
Abstract This work demonstrates the validity of approximating cathodoluminescence generation throughout the electron interaction volume by the total electron energy loss profile. The energy loss profiles in multilayer specimens were accurately calculated using the Monte Carlo simulation CASINO. Resolution of cathodoluminescence images can be estimated from the electron beam spot diameter, the electron penetration range, and the minority carrier diffusion length.