Some limitations of surface profile reconstruction in scanning electron microscopy | Zendy

Czepkowshi T. | Zendy; Słówko W. | Zendy

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Some limitations of surface profile reconstruction in scanning electron microscopy

Author(s) -

Czepkowshi T.,

Słówko W.

Publication year - 1996

Publication title -

scanning

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.359

H-Index - 47

eISSN - 1932-8745

pISSN - 0161-0457

DOI - 10.1002/sca.1996.4950180606

Subject(s) - scanning electron microscope , materials science , surface (topology) , surface reconstruction , nanotechnology , chemical engineering , optics , composite material , mathematics , physics , geometry , engineering

This paper is a contribution to development of electron beam profilography based on the so called “shape from shading” technique. A new formula of signal processing in a two detector system has been proposed. The formula en be applied to all the signals showing Lambert's angular distribution. The signal processing may be realized in “real time” in a simple analog processing system. However, an accuracy of the profiles is limited by numerous errors, mainly by shadowing effects. As the shadowing causes disturbances of the signal flow, a proper design of the detection system is necessary to reduce the errors.

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