Open AccessSome limitations of surface profile reconstruction in scanning electron microscopy
Author(s) -
Czepkowshi T.,
Słówko W.
Publication year - 1996
Publication title -
scanning
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.359
H-Index - 47
eISSN - 1932-8745
pISSN - 0161-0457
DOI - 10.1002/sca.1996.4950180606
Subject(s) - scanning electron microscope , materials science , surface (topology) , surface reconstruction , nanotechnology , chemical engineering , optics , composite material , mathematics , physics , geometry , engineering
This paper is a contribution to development of electron beam profilography based on the so called “shape from shading” technique. A new formula of signal processing in a two detector system has been proposed. The formula en be applied to all the signals showing Lambert's angular distribution. The signal processing may be realized in “real time” in a simple analog processing system. However, an accuracy of the profiles is limited by numerous errors, mainly by shadowing effects. As the shadowing causes disturbances of the signal flow, a proper design of the detection system is necessary to reduce the errors.