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An Exact Solution for the Optical Absorbance of Thin Films
Author(s) -
Babu S. V.,
Barouch E.
Publication year - 1987
Publication title -
studies in applied mathematics
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.164
H-Index - 46
eISSN - 1467-9590
pISSN - 0022-2526
DOI - 10.1002/sapm1987772173
Subject(s) - absorbance , closed form expression , thin film , lithography , exact solutions in general relativity , optics , materials science , physics , mathematical analysis , mathematics , nanotechnology
The electric and magnetic fields within optical thin films are obtained exactly in closed form as solutions of a system of difference equations presented by Berning and utilized by Dill, Neureuther, Tuttle, and Walker in their sample program for modeling optical lithography. The solution allows an explicit closed form expression for the absorbance.