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Modelling and decentralized control of a multizone crystal growth furnace
Author(s) -
Abraham R.,
Lunze J.
Publication year - 1992
Publication title -
international journal of robust and nonlinear control
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.361
H-Index - 106
eISSN - 1099-1239
pISSN - 1049-8923
DOI - 10.1002/rnc.4590020203
Subject(s) - robustness (evolution) , control theory (sociology) , decentralised system , control engineering , property (philosophy) , computer science , robust control , engineering , control (management) , control system , chemistry , biochemistry , philosophy , epistemology , artificial intelligence , gene , electrical engineering
The controller of a crystal growth furnace with 15 heating zones must have a decentralized structure. It is shown that each control station must necessarily satisfy a certain robustness property and that the design of the whole decentralized controller can be replaced by the problem of designing the control stations separately from each other as robust centralized controllers. As a basis for this, it is shown that the model can be considerably reduced. Although the zones are strongly coupled it will be seen here that, owing to structural properties of the plant, the furnace can be described by a model which has regard to only three zones. Experimental results with furnace illustrate the modelling and design methods used.