An investigation of cobalt oxide based nanocrystalline thin films by secondary ion mass spectrometry | Zendy

Barison Simona | Zendy; Barreca Davide | Zendy; Daolio Sergio | Zendy; Fabrizio Monica | Zendy; Tondello Eugenio | Zendy

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An investigation of cobalt oxide based nanocrystalline thin films by secondary ion mass spectrometry

Author(s) -

Barison Simona,

Barreca Davide,

Daolio Sergio,

Fabrizio Monica,

Tondello Eugenio

Publication year - 2001

Publication title -

rapid communications in mass spectrometry

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.528

H-Index - 136

eISSN - 1097-0231

pISSN - 0951-4198

DOI - 10.1002/rcm.397

Subject(s) - nanocrystalline material , secondary ion mass spectrometry , chemistry , cobalt , indium , indium tin oxide , cobalt oxide , substrate (aquarium) , thin film , oxide , analytical chemistry (journal) , mass spectrometry , chemical vapor deposition , tin , inorganic chemistry , chemical engineering , nanotechnology , layer (electronics) , materials science , crystallography , chromatography , organic chemistry , oceanography , engineering , geology

An investigation of cobalt oxide based nanocrystalline thin films by secondary ion mass spectrometry (SIMS) is presented. The coatings, whose composition ranged between CoO and Co 3 O 4 , were synthesized by chemical vapor deposition (CVD) on indium tin oxide (ITO) substrates, using cobalt(II) β‐diketonate as precursor. The SIMS analysis revealed a satisfactory precursor conversion into the oxides and allowed distinction of regions in the films at different compositions. Film‐substrate intermixing phenomena were evidenced and studied as a function of deposition temperature, film thickness and composition. Copyright © 2001 John Wiley & Sons, Ltd.

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