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An investigation of cobalt oxide based nanocrystalline thin films by secondary ion mass spectrometry
Author(s) -
Barison Simona,
Barreca Davide,
Daolio Sergio,
Fabrizio Monica,
Tondello Eugenio
Publication year - 2001
Publication title -
rapid communications in mass spectrometry
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.528
H-Index - 136
eISSN - 1097-0231
pISSN - 0951-4198
DOI - 10.1002/rcm.397
Subject(s) - nanocrystalline material , secondary ion mass spectrometry , chemistry , cobalt , indium , indium tin oxide , cobalt oxide , substrate (aquarium) , thin film , oxide , analytical chemistry (journal) , mass spectrometry , chemical vapor deposition , tin , inorganic chemistry , chemical engineering , nanotechnology , layer (electronics) , materials science , crystallography , chromatography , organic chemistry , oceanography , engineering , geology
An investigation of cobalt oxide based nanocrystalline thin films by secondary ion mass spectrometry (SIMS) is presented. The coatings, whose composition ranged between CoO and Co 3 O 4 , were synthesized by chemical vapor deposition (CVD) on indium tin oxide (ITO) substrates, using cobalt(II) β‐diketonate as precursor. The SIMS analysis revealed a satisfactory precursor conversion into the oxides and allowed distinction of regions in the films at different compositions. Film‐substrate intermixing phenomena were evidenced and studied as a function of deposition temperature, film thickness and composition. Copyright © 2001 John Wiley & Sons, Ltd.