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Mass spectrometric chemical balance of CF 4 decomposition in a plasma reactor
Author(s) -
Alayoubi S.,
Khairallah Y.,
Arefi F.,
Amouroux J.,
Gonnord M. F.
Publication year - 1995
Publication title -
rapid communications in mass spectrometry
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.528
H-Index - 136
eISSN - 1097-0231
pISSN - 0951-4198
DOI - 10.1002/rcm.1290090108
Subject(s) - chemistry , effluent , decomposition , tetrafluoride , mass spectrometry , yield (engineering) , chemical decomposition , chemical reactor , plasma , continuous reactor , analytical chemistry (journal) , chromatography , chemical engineering , organic chemistry , waste management , catalysis , thermodynamics , physics , quantum mechanics , engineering
The decomposition of carbon tetrafluoride (CF 4 ) in two types of plasma reactor has been investigated by using mass spectrometry. The optimization of the plasma process requires the establishment of an adequate chemical balance between major components and also traces in the reactor effluent, in order to minimize toxic emissions by control of the proper reactor parameters. On‐line mass spectrometric characterization of the effluent has been used to optimize the CF 4 decomposition yield. A GC/MS protocol has been developed to quantify both major and minor components of the effluent in order to evaluate its toxicity.