Open AccessCover Picture: QSAR Comb. Sci. 2/2008
Publication year - 2008
Publication title -
qsar & combinatorial science
Language(s) - English
Resource type - Reports
eISSN - 1611-0218
pISSN - 1611-020X
DOI - 10.1002/qsar.200890006
Subject(s) - ternary operation , sputtering , ternary plot , phase diagram , principal component analysis , composition (language) , mass spectrum , diagram , wafer , spectral line , secondary ion mass spectrometry , mass spectrometry , analytical chemistry (journal) , thin film , chemistry , materials science , phase (matter) , nanotechnology , computer science , database , physics , artificial intelligence , environmental chemistry , organic chemistry , chromatography , art , literature , astronomy , programming language
Co‐sputtering of three metallic elements is used to generate composition spread thin films. The gradient thickness profile from each sputtering gun results in continuously changing composition of the deposited ternary film across the wafer which can be directly mapped onto a ternary phase diagram. Various properties are rapidly mapped across the ternary phase diagram. In their Full Paper on pages 171‐178. Rossana Dell'Anna, Paolo Lazzeri, Roberto Canteri, Christian J. Long, Jason Hattrick‐Simpers, Ichiro Takeuchi, and Mariano Anderle used the supervised principal component technique to investigate the relationship between time of flight secondary ion mass spectrometry (ToF‐SIMS) spectra and the composition distribution across a Ni‐Ti‐Cu composition spread.