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Variability in measurements of micro lengths with a white light interferometer
Author(s) -
Ferri Carlo,
Brousseau Emmanuel
Publication year - 2008
Publication title -
quality and reliability engineering international
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.913
H-Index - 62
eISSN - 1099-1638
pISSN - 0748-8017
DOI - 10.1002/qre.903
Subject(s) - interferometry , optics , white light interferometry , white light , position (finance) , scanner , length measurement , interval (graph theory) , mathematics , statistics , physics , combinatorics , finance , economics
The effect of the discretionary set‐up parameters scan length and initial scanner position on the measurements of length performed with a white light interferometer microscope was investigated. In both analyses, two reference materials of nominal lengths 40 and 200 µm were considered. Random effects and mixed effects models were fitted to the data from two separate experiments. Punctual and interval estimates of variance components were provided. Copyright © 2008 John Wiley & Sons, Ltd.