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Breakdown characteristics of gate and tunnel oxides versus field and temperature
Author(s) -
Monsérié Christophe,
Mortini Patrick,
Ghibaudo Gérard,
Pananakakis Georges
Publication year - 1993
Publication title -
quality and reliability engineering international
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.913
H-Index - 62
eISSN - 1099-1638
pISSN - 0748-8017
DOI - 10.1002/qre.4680090414
Subject(s) - acceleration , electric field , field (mathematics) , materials science , range (aeronautics) , atmospheric temperature range , oxide , field dependence , condensed matter physics , analytical chemistry (journal) , composite material , chemistry , physics , thermodynamics , metallurgy , mathematics , classical mechanics , quantum mechanics , chromatography , magnetic field , pure mathematics
Abstract The wearout and breakdown parameters of representative gate and tunnel oxides are evaluated versus temperature, electric field and polarity. A frontier close to 127°C between two regions with different activation energies is clearly demonstrated. However, the negative charge build‐up under high field stress is correlated with the breakdown. The field acceleration factor is found to be constant in the range 8·5–12·5 MV/cm. The time‐to‐breakdown distributions can be described both by the E and the 1/ E models. Finally, the thickness dependence of the field acceleration factor is quantified for oxide layers with a thickness in the range between 10 nm and 50 nm.