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Pragmatic procedure for the estimation of thin dielectric reliability
Author(s) -
Vollertsen R.P.
Publication year - 1992
Publication title -
quality and reliability engineering international
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.913
H-Index - 62
eISSN - 1099-1638
pISSN - 0748-8017
DOI - 10.1002/qre.4680080608
Subject(s) - reliability (semiconductor) , reliability engineering , dielectric , estimation , computer science , statistics , materials science , mathematics , engineering , physics , optoelectronics , systems engineering , thermodynamics , power (physics)
A pragmatic procedure is developed for the reliability evaluation of thin dieletrics. It applies knowledge and plausible arguments for reasonable selection and implication of models. It is deduced that the Weibull distribution and the 1/ E model are the best choice for reliability predictions of thin dielectrics. Uncertainties and measurement expense can be reduced if worst‐case conditions are used. The measurement procedure, including the test structure requirements, is described in detail. A complete set of simple equations is given for data evaluation and reliability prediction. The study and comparison of reliability data is simplified. The effect of a burn‐in can be considered.