Calibration of excitonic photoluminescence to determine high aluminum concentrations in silicon | Zendy

Lauer Kevin | Zendy; Möller Christian | Zendy; Schulze Dirk | Zendy; Bartel Til | Zendy; Kirscht Fritz | Zendy

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Calibration of excitonic photoluminescence to determine high aluminum concentrations in silicon

Author(s) -

Lauer Kevin,

Möller Christian,

Schulze Dirk,

Bartel Til,

Kirscht Fritz

Publication year - 2013

Publication title -

physica status solidi (rrl) – rapid research letters

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.786

H-Index - 68

eISSN - 1862-6270

pISSN - 1862-6254

DOI - 10.1002/pssr.201307028

Subject(s) - photoluminescence , aluminium , exciton , silicon , analytical chemistry (journal) , spectroscopy , range (aeronautics) , materials science , calibration , intensity (physics) , calibration curve , chemistry , optics , optoelectronics , physics , condensed matter physics , metallurgy , detection limit , quantum mechanics , composite material , chromatography

The photoluminescence spectroscopy method for determining the concentration of shallow acceptors or donors in silicon is extended for the case of aluminum. A calibration function of the photoluminescence intensity ratio of the aluminum bound exciton Al TO (BE) and the free exciton I TO (FE) is reported in the aluminum concentration range of 10 15 –10 17 atoms/cm 3 and in the temperature range of 15 K < T < 27 K. It is described as Al TO (BE)/I TO ( FE) = 10 –15.1 × c Al 0.84 × e 5.9meV/ kT .Dependence of the PL intensity ratio Al TO (BE)/I TO (FE) on the aluminum concentration. The line represents the calibration function. (© 2013 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)

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