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Effects of Mn‐doping on surface acoustic wave properties of ZnO films
Author(s) -
Luo J. T.,
Fan P.,
Pan F.,
Zeng F.,
Zhang D. P.,
Zheng Z. H.,
Liang G. X.,
Cai X. M.
Publication year - 2012
Publication title -
physica status solidi (rrl) – rapid research letters
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.786
H-Index - 68
eISSN - 1862-6270
pISSN - 1862-6254
DOI - 10.1002/pssr.201206381
Subject(s) - doping , materials science , surface acoustic wave , insertion loss , thin film , analytical chemistry (journal) , manganese , optoelectronics , nanotechnology , optics , chemistry , metallurgy , physics , chromatography
Surface acoustic wave (SAW) filters based on Mn‐doped ZnO films have been fabricated and effects of Mn‐doping on SAW properties are investigated. It is found that the electromechanical coupling coefficient ( K 2 ) of Zn 0.913 Mn 0.087 O films is 0.73 ± 0.02%, which is 73.8% larger than that of undoped ZnO films (0.42 ± 0.02%). Zn 0.913 Mn 0.087 O film filters also exhibit a lower absolute value of insertion loss (|IL|) of 16.1 dB and larger bandwidth (BW) of 5.9 MHz compared with that of undoped ZnO film filter. However, Zn 0.952 Mn 0.048 O film filters exhibit a smaller K 2 of 0.34 ± 0.02%, larger |IL| of 26.9 dB and smaller BW of 3.5 MHz. It is suggested that the SAW properties can be improved by appropriate Mn‐doping and Mn–ZnO/Si multilayer structure with large d 33 is promising for wide‐band and low‐loss SAW applications. (© 2012 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)