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Design and maskless fabrication of ultrathin suspended membranes of GaN
Author(s) -
Tiginyanu I. M.,
Popa V.,
StevensKalceff M. A.,
Gerthsen D.,
Brenner P.,
Pavlidis D.
Publication year - 2012
Publication title -
physica status solidi (rrl) – rapid research letters
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.786
H-Index - 68
eISSN - 1862-6270
pISSN - 1862-6254
DOI - 10.1002/pssr.201206020
Subject(s) - fabrication , membrane , materials science , nanotechnology , etching (microfabrication) , microelectromechanical systems , nanoelectromechanical systems , optoelectronics , luminescence , chemistry , layer (electronics) , medicine , nanomedicine , biochemistry , alternative medicine , pathology , nanoparticle
We report the maskless fabrication of ultrathin suspended GaN membranes designed by focused ion beam treatment of the GaN epilayer surface with subsequent photoelectrochemical etching. This technological approach allows the fabrication of ultrathin membranes, as well as supporting micro/nanocolumns in a controlled fashion. The analysis of the spatial and spectral distribution of microcathodoluminescence demonstrates that the membranes exhibit mainly yellow luminescence. These results pave the way for the fabrication of ultrathin suspended GaN membranes for MEMS/NEMS applications.(© 2012 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)