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Local piezoelectric response of ZnO nanoparticles embedded in a photosensitive polymer
Author(s) -
Prashanthi K.,
Zhang H.,
Ramgopal Rao V.,
Thundat T.
Publication year - 2012
Publication title -
physica status solidi (rrl) – rapid research letters
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.786
H-Index - 68
eISSN - 1862-6270
pISSN - 1862-6254
DOI - 10.1002/pssr.201105538
Subject(s) - piezoelectricity , materials science , photolithography , polymer , nanoelectromechanical systems , fabrication , nanoparticle , epoxy , photosensitivity , nanotechnology , microelectromechanical systems , optoelectronics , composite material , medicine , nanomedicine , alternative medicine , pathology
Local piezoelectric properties of ZnO nanoparticles (NPs) embedded in a photo‐epoxy polymer are investigated by piezoresponse force microscopy (PFM). Integrating ZnO NPs into a photosensitive SU‐8 polymer matrix not only retains the highly desired piezoelectric properties of the ZnO, but also preserves photosensitivity and optical transparency of the SU‐8 polymer. These results have strong implications for simple photolithography based low‐cost fabrication of piezoelectric microelectromechanicalsystems (MEMS) and nanoelectromechanicalsystems (NEMS) in both sensing and energy harvesting applications. (© 2012 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)