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Microstructured horizontal alumina pore arrays as growth templates for large area few and single nanowire devices
Author(s) -
Xiang Ying,
Lee Woo,
Nielsch Kornelius,
Abstreiter Gerhard,
Fontcuberta i Morral Anna
Publication year - 2008
Publication title -
physica status solidi (rrl) – rapid research letters
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.786
H-Index - 68
eISSN - 1862-6270
pISSN - 1862-6254
DOI - 10.1002/pssr.200701300
Subject(s) - nanopore , materials science , nanowire , porosity , nanotechnology , nanoelectronics , scanning electron microscope , anodizing , template , fabrication , substrate (aquarium) , optoelectronics , aluminium , composite material , medicine , oceanography , alternative medicine , pathology , geology
We demonstrate the fabrication of horizontally aligned and well‐defined nanopore structures by anodic oxidation of aluminum thin films and micro stripes on a Si substrate. We are able to control both, the pore diameters and interpore distances from 10 nm to 130 nm and from 30 nm to 275 nm, respectively. The anisotropy of the system induces some deviations in the pore configuration from the typical honeycomb structure. By decreasing the dimensions of the Al structures, the final pore diameter and interpore distance remains constant, enabling the transition from multiple to a few nanowire porous structures. Finally, we successfully filled the nanopores by pulsed electroplating, as demonstrated both by Scanning Electron Microscopy and by current–voltage measurements. Having full control over the size, the density, the position and the orientation of the porous structure, our approach is promising for many exciting applications, including nanoelectronics and sensing. (© 2008 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)