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Environmentally friendly approach for nonlithographic nanostructuring of materials
Author(s) -
Tiginyanu I. M.,
Monaico E.,
Albu S.,
Ursaki V. V.
Publication year - 2007
Publication title -
physica status solidi (rrl) – rapid research letters
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.786
H-Index - 68
eISSN - 1862-6270
pISSN - 1862-6254
DOI - 10.1002/pssr.200701007
Subject(s) - environmentally friendly , anodizing , nanolithography , materials science , nanotechnology , etching (microfabrication) , aqueous solution , hexagonal crystal system , self assembly , semiconductor , anode , optoelectronics , fabrication , metallurgy , aluminium , chemistry , electrode , crystallography , organic chemistry , medicine , ecology , alternative medicine , pathology , layer (electronics) , biology
Self‐organized quasi‐ordered two‐dimensional hexagonal arrays of pores with diameters as low as 70 nm in n‐InP substrates subjected to anodic etching in aqueous solution of NaCl are reported. We show that proper periodic modulation of the applied potential with time allows one to reach 3D nanostructuring of the material. Anodization in salty water proves to be a cost‐effective and environmentally‐friendly tool for spatial nanostructuring of materials and nonlithographic manufacturing of semiconductor nanotemplates for nanofabrication. (© 2007 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)