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Ellipsometric Characterization of Layers on Transparent Semiconductor Wafers
Author(s) -
Zettler J.Th.,
Schrottke L.
Publication year - 1991
Publication title -
physica status solidi (b)
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.51
H-Index - 109
eISSN - 1521-3951
pISSN - 0370-1972
DOI - 10.1002/pssb.2221630146
Subject(s) - wafer , library science , characterization (materials science) , citation , ellipsometry , amorphous semiconductors , information retrieval , physics , engineering physics , materials science , optics , nanotechnology , optoelectronics , computer science , silicon , thin film
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