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Optical Properties of SiN x Films of Variable Composition
Author(s) -
Shabalov A. L.,
Feldman M. S.,
Bashirov M. Z.
Publication year - 1988
Publication title -
physica status solidi (b)
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.51
H-Index - 109
eISSN - 1521-3951
pISSN - 0370-1972
DOI - 10.1002/pssb.2221450150
Subject(s) - library science , composition (language) , physics , chinese academy of sciences , computer science , political science , philosophy , china , law , linguistics