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Interface Defects in Sputtered a‐Si:H/a‐C:H Multilayers
Author(s) -
He Deyan,
Zhang Fangqing,
Cui Jingzhong,
Chen Guanghua
Publication year - 1987
Publication title -
physica status solidi (b)
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 0.51
H-Index - 109
eISSN - 1521-3951
pISSN - 0370-1972
DOI - 10.1002/pssb.2221420139
Subject(s) - library science , zhàng , citation , chen , chinese academy of sciences , china , physics , engineering physics , computer science , history , paleontology , archaeology , biology
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