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The Theory of X‐Ray Diffraction Analysis of Elastic‐Strain States in Epitaxial Films
Author(s) -
Khapachev Yu. P.,
Dyshekov A. A.,
Kiselev D. S.
Publication year - 1984
Publication title -
physica status solidi (b)
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.51
H-Index - 109
eISSN - 1521-3951
pISSN - 0370-1972
DOI - 10.1002/pssb.2221260103
Subject(s) - superlattice , strain (injury) , tensor (intrinsic definition) , infinitesimal strain theory , materials science , epitaxy , substrate (aquarium) , heterojunction , diffraction , condensed matter physics , stress (linguistics) , x ray , cauchy stress tensor , crystallography , optics , physics , mathematical analysis , mathematics , pure mathematics , composite material , chemistry , thermodynamics , geology , finite element method , layer (electronics) , medicine , linguistics , oceanography , philosophy
The possibility to determine five components of the strain tensor of an expitaxial film is demonstrated. The general expressions are given for the values of the discrepancy of periods of the film and the substrate, and for the components of the stress tensor in cubic heterostructures. Special emphasis is given to the definition of stresses in the layers of a superlattice.