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DLTS Investigations of Si–SiO 2 Interface States of Electron‐Beam Irradiated MOS Structures
Author(s) -
Hübner K.,
Köster H.,
Derlich B.,
Ecke W.
Publication year - 1983
Publication title -
physica status solidi (b)
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.51
H-Index - 109
eISSN - 1521-3951
pISSN - 0370-1972
DOI - 10.1002/pssb.2221180257
Subject(s) - physics