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Infrared Studies of Reactively Sputtered SiO x Films in the Composition Range 0.2 ≦ x ≦ 1.9
Author(s) -
Schumann L.,
Lehmann A.,
Sobotta H.,
Riede V.,
Teschner U.,
Hübner K.
Publication year - 1982
Publication title -
physica status solidi (b)
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.51
H-Index - 109
eISSN - 1521-3951
pISSN - 0370-1972
DOI - 10.1002/pssb.2221100157
Subject(s) - physics , condensed matter physics