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Vibrational spectrum of hydrogenated amorphous SiC films
Author(s) -
Wieder H.,
Cardona M.,
Guarnieri C. R.
Publication year - 1979
Publication title -
physica status solidi (b)
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.51
H-Index - 109
eISSN - 1521-3951
pISSN - 0370-1972
DOI - 10.1002/pssb.2220920112
Subject(s) - amorphous solid , infrared spectroscopy , materials science , silicon , amorphous silicon , hydrogen , glow discharge , chemical composition , infrared , spectral line , analytical chemistry (journal) , absorption spectroscopy , amorphous carbon , absorption (acoustics) , crystallography , chemical bond , chemistry , crystalline silicon , optics , metallurgy , organic chemistry , plasma , composite material , physics , quantum mechanics , astronomy
Infrared absorption spectra are presented of amorphous Si 1− x C x films made by the glow discharge process. Four bands, representing the stretching modes of SiH, CH, and SiC, and the wagging mode of SiCH 3 , were followed over the entire alloy composition range. It is shown that the compositional dependence of these bands varies in a manner predicted by a model in which Si and C atoms are randomly distributed throughout the film without chemical ordering. The bonded hydrogen content in the films is estimated to be of the order of 20 to 30 at%, depending on composition, with the silicon atoms bonding to a single hydrogen and the carbons bonding predominantly as CH 2 and CH 3 groups.
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