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Monte Carlo simulation on the behavior of energetic ions in polyatomic targets
Author(s) -
Ishitani T.,
Shimizu R.,
Murata K.
Publication year - 1972
Publication title -
physica status solidi (b)
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.51
H-Index - 109
eISSN - 1521-3951
pISSN - 0370-1972
DOI - 10.1002/pssb.2220500230
Subject(s) - polyatomic ion , monte carlo method , ion , range (aeronautics) , atomic physics , scattering , physics , computational physics , statistical physics , materials science , optics , quantum mechanics , statistics , mathematics , composite material
The behavior of energetic ions in polyatomic targets is simulated by the Monte Carlo technique, which is based on a single scattering model taking account of nuclear and electronic stopping. The results follow the experiments fairly well as to range and energy distribution of transmitted ions through thin films. The present simulation is, in principle, applicable to any combination of ion beam and target.