Achromatic Deep Ultraviolet Lens Using Novel Optical Materials | Zendy

Minami Yuki | Zendy; Cadatal-Raduban Marilou | Zendy; Kuroda Koki | Zendy; Shinohara Keito | Zendy; Lai Youwei | Zendy; Yamanoi Kohei | Zendy; Sarukura Nobuhiko | Zendy; Shimizu Toshihiko | Zendy; Ishii Ryota | Zendy; Kawakami Yoichi | Zendy; Kabasawa Nobuo | Zendy; Amano Takashi | Zendy; Kiyohara Kosuke | Zendy; Kiyohara Motosuke | Zendy

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Achromatic Deep Ultraviolet Lens Using Novel Optical Materials

Author(s) -

Minami Yuki,

Cadatal-Raduban Marilou,

Kuroda Koki,

Shinohara Keito,

Lai Youwei,

Yamanoi Kohei,

Sarukura Nobuhiko,

Shimizu Toshihiko,

Ishii Ryota,

Kawakami Yoichi,

Kabasawa Nobuo,

Amano Takashi,

Kiyohara Kosuke,

Kiyohara Motosuke

Publication year - 2020

Publication title -

physica status solidi (b)

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.51

H-Index - 109

eISSN - 1521-3951

pISSN - 0370-1972

DOI - 10.1002/pssb.201900480

Subject(s) - achromatic lens , lens (geology) , optics , chromatic aberration , lithium fluoride , materials science , focal length , ultraviolet , magnesium fluoride , numerical aperture , spherical aberration , wavelength , chromatic scale , optoelectronics , magnesium , chemistry , physics , inorganic chemistry , metallurgy

The development of an achromatic lens in the deep ultraviolet (DUV) region is reported. The dispersion and Abbe numbers of lithium calcium aluminum fluoride (LiCaAlF 6 ), magnesium fluoride (MgF 2 ), lithium fluoride (LiF), calcium fluoride (CaF 2 ), and fused silica (SiO 2 ) are investigated in the wavelength range from 200 to 300 nm to determine appropriate material combinations for minimizing chromatic aberration in a doublet. Based on the results of these investigations, a prototype DUV objective lens is fabricated using a LiCaAlF 6 (convex lens)SiO 2 (concave lens) doublet. The objective lens has a focal length of 10 mm, working distance of 2 mm, and numerical aperture (NA) of 0.2. The objective lens is evaluated to have a chromatic aberration of about 2.8% and resolution of at least 2 μm. It is also evaluated to have a smaller spherical aberration compared with a reflective objective lens with a similar NA.

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