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Achromatic Deep Ultraviolet Lens Using Novel Optical Materials
Author(s) -
Minami Yuki,
Cadatal-Raduban Marilou,
Kuroda Koki,
Shinohara Keito,
Lai Youwei,
Yamanoi Kohei,
Sarukura Nobuhiko,
Shimizu Toshihiko,
Ishii Ryota,
Kawakami Yoichi,
Kabasawa Nobuo,
Amano Takashi,
Kiyohara Kosuke,
Kiyohara Motosuke
Publication year - 2020
Publication title -
physica status solidi (b)
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.51
H-Index - 109
eISSN - 1521-3951
pISSN - 0370-1972
DOI - 10.1002/pssb.201900480
Subject(s) - achromatic lens , lens (geology) , optics , chromatic aberration , lithium fluoride , materials science , focal length , ultraviolet , magnesium fluoride , numerical aperture , spherical aberration , wavelength , chromatic scale , optoelectronics , magnesium , chemistry , physics , inorganic chemistry , metallurgy
The development of an achromatic lens in the deep ultraviolet (DUV) region is reported. The dispersion and Abbe numbers of lithium calcium aluminum fluoride (LiCaAlF 6 ), magnesium fluoride (MgF 2 ), lithium fluoride (LiF), calcium fluoride (CaF 2 ), and fused silica (SiO 2 ) are investigated in the wavelength range from 200 to 300 nm to determine appropriate material combinations for minimizing chromatic aberration in a doublet. Based on the results of these investigations, a prototype DUV objective lens is fabricated using a LiCaAlF 6 (convex lens)SiO 2 (concave lens) doublet. The objective lens has a focal length of 10 mm, working distance of 2 mm, and numerical aperture (NA) of 0.2. The objective lens is evaluated to have a chromatic aberration of about 2.8% and resolution of at least 2 μm. It is also evaluated to have a smaller spherical aberration compared with a reflective objective lens with a similar NA.