Highly Crystalline MoS 2  Thin Films Fabricated by Sulfurization | Zendy

Hutar Peter | Zendy; Spankova Marianna | Zendy; Sojkova Michaela | Zendy; Dobrocka Edmund | Zendy; Vegso Karol | Zendy; Hagara Jakub | Zendy; Halahovets Yuriy | Zendy; Majkova Eva | Zendy; Siffalovic Peter | Zendy; Hulman Martin | Zendy

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Highly Crystalline MoS 2 Thin Films Fabricated by Sulfurization

Author(s) -

Hutar Peter,

Spankova Marianna,

Sojkova Michaela,

Dobrocka Edmund,

Vegso Karol,

Hagara Jakub,

Halahovets Yuriy,

Majkova Eva,

Siffalovic Peter,

Hulman Martin

Publication year - 2019

Publication title -

physica status solidi (b)

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.51

H-Index - 109

eISSN - 1521-3951

pISSN - 0370-1972

DOI - 10.1002/pssb.201900342

Subject(s) - x ray photoelectron spectroscopy , materials science , sapphire , substrate (aquarium) , raman spectroscopy , thin film , diffraction , sputter deposition , spectroscopy , sputtering , stoichiometry , raman scattering , epitaxy , crystallography , analytical chemistry (journal) , nanotechnology , optics , chemistry , chemical engineering , layer (electronics) , laser , oceanography , physics , organic chemistry , quantum mechanics , chromatography , geology , engineering

The 2D transition metal dichalcogenides attract high research interest due to their electronic properties, and MoS 2 is likely the most explored compound of this group. The fabrication of MoS 2 thin films by the sulfurization of predeposited MoO 3 layers on a c‐plane sapphire substrate by radio frequency magnetron sputtering from stoichiometric MoO 3 target is reported. The structure and properties of as‐grown MoO 3 and MoS 2 layers are characterized by several methods including X‐ray diffraction, grazing‐incidence wide‐angle X‐ray scattering, photoelectron spectroscopy, Raman spectroscopy, and atomic force microscopy. Furthermore, the influence of the crystallographic structure of MoO 3 layers on the final MoS 2 films is studied. The influence of the crystallographic structure of MoO 3 on the resulting MoS 2 films is focused. A strong texturation in the c ‐axis direction and an indication of a high degree in‐plane orientation of MoS 2 thin films on the c‐sapphire substrate is observed.

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