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Micro Grating Deposition on Non‐Planar Surfaces by Polymer‐Assisted Transfer Printing
Author(s) -
Balogun Olufemi,
Pekkarinen Markku,
Saarinen Jyrki,
Kaplas Tommi
Publication year - 2019
Publication title -
physica status solidi (b)
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.51
H-Index - 109
eISSN - 1521-3951
pISSN - 0370-1972
DOI - 10.1002/pssb.201800595
Subject(s) - materials science , grating , layer (electronics) , fabrication , substrate (aquarium) , transfer printing , optoelectronics , planar , coating , thin film , nanometre , spin coating , optics , deposition (geology) , nanotechnology , composite material , medicine , paleontology , oceanography , alternative medicine , computer graphics (images) , physics , pathology , sediment , geology , computer science , biology
By spin‐coating a few hundred of nanometer thick poly(methyl methacrylate) (PMMA) film on a micron or a sub‐micron scale structure, the structure can be transferred on an arbitrary substrate. More precisely, by using a thin PMMA support layer and releasing the structure from the transient substrate into water, the PMMA with the structure can be collected on a desired substrate. Here, this technique is demonstrated to be suitable for transferring metallic binary grating and few‐layer Bragg gratings from flat substrates onto 3D‐printed convex lenses. Moreover, the thin PMMA film is sufficiently strong to support centimeter size free‐standing areas. This enables fabrication of 1.5 μm thick, free‐standing structure of a Bragg‐grating with PMMA. Thus, the presented technique provides a powerful tool for transfer printing of micron scale structures.