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Polycrystalline ZrB 2 coating prepared on graphite by chemical vapor deposition
Author(s) -
Wang Peng,
Qi Yushi,
Zhou Shanbao,
Hu Ping,
Chen Guiqing,
Zhang Xinghong,
Han Wenbo
Publication year - 2016
Publication title -
physica status solidi (b)
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.51
H-Index - 109
eISSN - 1521-3951
pISSN - 0370-1972
DOI - 10.1002/pssb.201552752
Subject(s) - crystallite , chemical vapor deposition , coating , graphite , materials science , microstructure , chemical engineering , water vapor , nitrogen , adsorption , oxygen , deposition (geology) , composite material , nanotechnology , metallurgy , chemistry , organic chemistry , sediment , engineering , biology , paleontology
Polycrystalline ZrB 2 coating was prepared on graphite by chemical vapor deposition (CVD) using a gas mixture of ZrCl 4 , BCl 3 , H 2 , and Ar at 1200 °C. The microstructure and phase composition of the coating were investigated. The results indicated that the coating structure was loose. ZrO 2 and B 2 O 3 detected on the surface of ZrB 2 grains were formed by oxidation due to exposure to air. Some adsorbed oxygen, nitrogen, and water vapor was also detected on the surface of ZrB 2 grains. The feasibility of preparation of ZrB 2 on graphite by CVD using ZrCl 4 , BCl 3 , and H 2 was verified.