Polycrystalline ZrB 2  coating prepared on graphite by chemical vapor deposition | Zendy

Wang Peng | Zendy; Qi Yushi | Zendy; Zhou Shanbao | Zendy; Hu Ping | Zendy; Chen Guiqing | Zendy; Zhang Xinghong | Zendy; Han Wenbo | Zendy

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Polycrystalline ZrB 2 coating prepared on graphite by chemical vapor deposition

Author(s) -

Wang Peng,

Qi Yushi,

Zhou Shanbao,

Hu Ping,

Chen Guiqing,

Zhang Xinghong,

Han Wenbo

Publication year - 2016

Publication title -

physica status solidi (b)

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.51

H-Index - 109

eISSN - 1521-3951

pISSN - 0370-1972

DOI - 10.1002/pssb.201552752

Subject(s) - crystallite , chemical vapor deposition , coating , graphite , materials science , microstructure , chemical engineering , water vapor , nitrogen , adsorption , oxygen , deposition (geology) , composite material , nanotechnology , metallurgy , chemistry , organic chemistry , sediment , engineering , biology , paleontology

Polycrystalline ZrB 2 coating was prepared on graphite by chemical vapor deposition (CVD) using a gas mixture of ZrCl 4 , BCl 3 , H 2 , and Ar at 1200 °C. The microstructure and phase composition of the coating were investigated. The results indicated that the coating structure was loose. ZrO 2 and B 2 O 3 detected on the surface of ZrB 2 grains were formed by oxidation due to exposure to air. Some adsorbed oxygen, nitrogen, and water vapor was also detected on the surface of ZrB 2 grains. The feasibility of preparation of ZrB 2 on graphite by CVD using ZrCl 4 , BCl 3 , and H 2 was verified.

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