Premium
Fabrication of periodically ordered diamond nanostructures by microsphere lithography
Author(s) -
Domonkos Maria,
Izak Tibor,
Stolcova Lucie,
Proska Jan,
Kromka Alexander
Publication year - 2014
Publication title -
physica status solidi (b)
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.51
H-Index - 109
eISSN - 1521-3951
pISSN - 0370-1972
DOI - 10.1002/pssb.201451172
Subject(s) - materials science , diamond , nanotechnology , fabrication , reactive ion etching , chemical vapor deposition , etching (microfabrication) , lithography , nanostructure , monolayer , layer (electronics) , nanosphere lithography , seeding , optoelectronics , composite material , medicine , alternative medicine , pathology , aerospace engineering , engineering
Structured diamond films are required for several uses as photonic crystals, (bio‐) sensors, biomedicine, etc. Often, these uses require fabrication of nano‐sized features with the assistance of lithographic techniques. In this paper, we demonstrate the growth of diamond structures well ordered in periodic arrays. The technological process starts with ultrasonic seeding of Si substrates by ultra‐dispersed detonation diamond nanoparticles. Then, a monolayer of polystyrene microspheres (PS) is deposited on seeded Si substrates by Langmuir–Blodgett method. The primary diameter of PS varies from 253 to 940 nm. The self‐assembled PS are employed as a mechanical mask for reactive ion etching of the seeding layer via reducing the PS diameter down. The seeding structures remained under reduced PS were used for growing periodically ordered diamond arrays by microwave plasma‐assisted chemical vapor deposition from a hydrogen rich gas mixture. Cross‐section SEM images reveal that the diameter and size of the formed diamond structures increase both in vertical and lateral direction. At a certain deposition time, the structures start to coalesce into a continuous layer.