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Investigation of NV centers in diamond nanocrystallites and nanopillars
Author(s) -
Petkov Emil,
Popov Cyril,
Rendler Torsten,
Petkov Christo,
Schnabel Florian,
Fedder Helmut,
Lee SangYun,
Kulisch Wilhelm,
Reithmaier Johann Peter,
Wrachtrup Jörg
Publication year - 2013
Publication title -
physica status solidi (b)
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.51
H-Index - 109
eISSN - 1521-3951
pISSN - 0370-1972
DOI - 10.1002/pssb.201248384
Subject(s) - nanopillar , materials science , diamond , chemical vapor deposition , crystallite , nucleation , nanosphere lithography , nanotechnology , etching (microfabrication) , focused ion beam , reactive ion etching , silicon , optoelectronics , nanostructure , ion , chemistry , layer (electronics) , composite material , metallurgy , medicine , alternative medicine , organic chemistry , pathology , fabrication
Nitrogen‐vacancy (NV) centers were incorporated during hot filament chemical vapor deposition of diamond nanocrystallites and nanocrystalline diamond (NCD) films. From the latter nanopillars with different diameters were prepared applying electron beam lithography and inductively coupled plasma reactive ion etching. The deposition of either single crystallites or closed films was controlled by the nucleation density on the silicon substrates and the process duration. Optical investigations revealed the presence of ensembles of color centers in both nanostructures. An enhancement of the fluorescence emission by an order of magnitude was observed after the structuring of the NCD films.