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Low‐temperature growth of multi‐walled carbon nanotubes by thermal CVD
Author(s) -
Halonen Niina,
Sápi András,
Nagy László,
Puskás Róbert,
Leino AnneRiikka,
Mäklin Jani,
Kukkola Jarmo,
Tóth Geza,
Wu MingChung,
Liao HsuehChung,
Su WeiFang,
Shchukarev Andrey,
Mikkola JyriPekka,
Kukovecz Ákos,
Kónya Zoltán,
Kordás Krisztián
Publication year - 2011
Publication title -
physica status solidi (b)
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.51
H-Index - 109
eISSN - 1521-3951
pISSN - 0370-1972
DOI - 10.1002/pssb.201100137
Subject(s) - carbon nanotube , x ray photoelectron spectroscopy , materials science , raman spectroscopy , methanol , catalysis , chemical engineering , acetylene , chemical vapor deposition , oxide , xylene , carbon fibers , tetrahydrofuran , thermogravimetric analysis , inorganic chemistry , chemistry , nanotechnology , organic chemistry , solvent , composite material , benzene , metallurgy , composite number , physics , optics , engineering
Low‐temperature thermal chemical vapor deposition (thermal CVD) synthesis of multi‐walled carbon nanotubes (MWCNTs) was studied using a large variety of different precursor compounds. Cyclopentene oxide, tetrahydrofuran, methanol, and xylene:methanol mixture as oxygen containing heteroatomic precursors, while xylene and acetylene as conventional hydrocarbon feedstocks were applied in the experiments. The catalytic activity of Co, Fe, Ni, and their bi‐ as well as tri‐metallic combinations were tested for the reactions. Low‐temperature CNT growth occurred at 400 °C when using bi‐metallic Co–Fe and tri‐metallic Ni–Co–Fe catalyst (on alumina) and methanol or acetylene as precursors. In the case of monometallic catalyst nanoparticles, only Co (both on alumina and on silica) was found to be active in the low temperature growth (below 500 °C) from oxygenates such as cyclopentene oxide and methanol. The structure and composition of the achieved MWCNTs products were studied by scanning and transmission electron microscopy (SEM and TEM) as well as by Raman and X‐ray photoelectron spectroscopy (XPS) and by X‐ray diffraction (XRD). The successful MWCNT growth below 500 °C is promising from the point of view of integrating MWCNT materials into existing IC fabrication technologies.