Premium
Scanning probe lithography on graphene
Author(s) -
Neubeck Soeren,
Freitag Frank,
Yang Rui,
Novoselov Kostya S.
Publication year - 2010
Publication title -
physica status solidi (b)
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.51
H-Index - 109
eISSN - 1521-3951
pISSN - 0370-1972
DOI - 10.1002/pssb.201000186
Subject(s) - graphene , lithography , materials science , nanotechnology , scanning probe microscopy , line width , graphite , resolution (logic) , optoelectronics , optics , computer science , physics , composite material , artificial intelligence
In this paper, we want to outline the principles of how scanning probe lithography on graphene is performed. We will show several examples of structures etched in graphene using this technique, including an example of a nanoelectronic device. In the last part, we present data regarding the oxidation kinetics when performing scanning probe lithography on graphite (HOPG).Two lines oxidized in graphene using scanning probe lithography. The left line (indicated by the arrow) is only 30 nm wide, indicating that this technique has good enough resolution to create nanoelectronic device structures.