Premium
On the selectivity of nanostructured semiconductor gas sensors
Author(s) -
Heszler P.,
Ionescu R.,
Llobet E.,
Reyes L. F.,
Smulko J. M.,
Kish L. B.,
Granqvist C. G.
Publication year - 2007
Publication title -
physica status solidi (b)
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.51
H-Index - 109
eISSN - 1521-3951
pISSN - 0370-1972
DOI - 10.1002/pssb.200776183
Subject(s) - selectivity , nanoporous , resistive touchscreen , semiconductor , materials science , doping , nanotechnology , nanoparticle , optoelectronics , sensitivity (control systems) , analytical chemistry (journal) , chemical engineering , chemistry , electronic engineering , chromatography , organic chemistry , computer science , catalysis , engineering , computer vision
Different methods are presented for improving chemical selectivity and sensitivity of semiconductor gas sensors consisting of nanostructured thin films. Pure and doped WO 3 nanoparticles, forming nanoporous layers, are used as test material. The chemical selectivity is increased by applying different operating temperatures, using temperature modulation and pattern recognition methods, and by a fluctuation enhanced spectroscopy technique. The selectivity improvement of a fluctuation enhanced sensor is compared to that of a classical resistive sensor. (© 2007 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)