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Magnetoresistance and surface properties with deposition condition for La–Sr–Mn–O thin films
Author(s) -
Ahn Geun Young,
Park SeungIel,
Shim InBo,
Cho Young Suk,
Kim Chul Sung
Publication year - 2004
Publication title -
physica status solidi (b)
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.51
H-Index - 109
eISSN - 1521-3951
pISSN - 0370-1972
DOI - 10.1002/pssb.200304673
Subject(s) - thin film , magnetoresistance , materials science , sputter deposition , analytical chemistry (journal) , crystallite , microstructure , magnetization , partial pressure , surface roughness , sputtering , chemistry , oxygen , metallurgy , magnetic field , composite material , nanotechnology , physics , organic chemistry , chromatography , quantum mechanics
Polycrystalline La–Sr–Mn–O thin films were grown through RF magnetron sputtering on Si(100) substrates. The conditions for the deposition of the La–Sr–Mn–O thin films were 0, 20, 40, 60 and 80% partial oxygen pressures of the buffer gas, an RF magnetron sputtering power of 2.46 W/cm 2 and a substrate temperature of room temperature. After the deposition, all the films were annealed in the air for 3 hours at 800 °C. The crystal structure, the chemical composition, the microstructure, the magnetic properties and the low‐field magnetoresistance of the La–Sr–Mn–O films were studied using X‐ray diffraction, Rutherford back‐scattering spectroscopy, atomic force microscopy, and a vibrating sample magnetometer. The crystal structure of the LSMO thin films was found to be a pseudo‐cubic perovskite. As the partial oxygen pressure increased, particle size and root mean square roughness decreased while saturation magnetization and the low‐field magnetoresistance increased. (© 2004 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)