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Zinc oxide thin films synthesized by metal organic chemical reactions
Author(s) -
Yasuda Takashi,
Segawa Yusaburo
Publication year - 2004
Publication title -
physica status solidi (b)
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.51
H-Index - 109
eISSN - 1521-3951
pISSN - 0370-1972
DOI - 10.1002/pssb.200304209
Subject(s) - metalorganic vapour phase epitaxy , chemical vapor deposition , zinc , metal , sapphire , oxide , decomposition , thin film , inorganic chemistry , materials science , chemistry , chemical engineering , organic chemistry , nanotechnology , epitaxy , layer (electronics) , laser , physics , engineering , optics
High quality ZnO films on sapphire substrates were synthesized using metal organic chemical reactions, such as metal organic chemical vapour deposition (MOCVD) and metal organic decomposition (MOD) method. Stable solid source of Zn‐acetylacetonate was used for MOCVD, and the sol‐gel method from Zn‐acetate, 2‐methoxyethanol and 2‐aminoethanol, and a commercial MOD source from Symetrix Co. were used for MOD. Dominant excitonic emission was obtained from these layers synthesized by these simple and economical methods, which are expected to develop powerful techniques for functional oxide fabrications. (© 2004 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)