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Effect of incident probe on HAADF STEM images
Author(s) -
Watanabe K.,
Nakanishi N.,
Yamazaki T.,
Kawasaki M.,
Hashimoto I.,
Shiojiri M.
Publication year - 2003
Publication title -
physica status solidi (b)
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.51
H-Index - 109
eISSN - 1521-3951
pISSN - 0370-1972
DOI - 10.1002/pssb.200301354
Subject(s) - scanning transmission electron microscopy , optics , contrast transfer function , optical transfer function , spherical aberration , fourier transform , resolution (logic) , materials science , dark field microscopy , lens (geology) , high resolution transmission electron microscopy , image resolution , physics , microscopy , transmission electron microscopy , computer science , quantum mechanics , artificial intelligence
Atomic‐resolution incoherent high‐angle annular dark field (HAADF) scanning transmission electron microscopy (STEM) images of [011]‐oriented Si have been recorded using different incident beam probes, and analysed by means of dynamical image calculation based on the Bloch wave description. It is shown how atomic‐resolution images are influenced by the semiangle of the probe and the spherical aberration and defocus of the probe‐forming lens. The resolution of an incoherent HAADF STEM image can be simply perceived by the contrast transfer function of incoherent imaging which is the Fourier transform of the incident probe intensity.