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Ätzgeschwindigkeit an SiO 2 ‐Schichten auf Silizium
Author(s) -
Reupert W.
Publication year - 1966
Publication title -
physica status solidi (b)
Language(s) - German
Resource type - Journals
SCImago Journal Rank - 0.51
H-Index - 109
eISSN - 1521-3951
pISSN - 0370-1972
DOI - 10.1002/pssb.19660140250
Subject(s) - citation , volume (thermodynamics) , physics , computer science , information retrieval , library science , thermodynamics
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