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Impact of Laser‐Induced Graphitization on Diamond Schottky Barrier Diodes
Author(s) -
Iwao Tomoki,
Sittimart Phongsaphak,
Yoshitake Tsuyoshi,
Umezawa Hitoshi,
Ohmagari Shinya
Publication year - 2022
Publication title -
physica status solidi (a)
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.532
H-Index - 104
eISSN - 1862-6319
pISSN - 1862-6300
DOI - 10.1002/pssa.202270043
Subject(s) - wafer dicing , laser , diamond , materials science , schottky barrier , schottky diode , optoelectronics , diode , electronics , optics , composite material , electrical engineering , wafer , engineering , physics
Schottky Barrier Diodes Laser dicing is applied for diamond Schottky barrier diodes (SBDs) to develop the back‐end process for future diamond electronics. The structural and electrical impact of laser‐induced graphitization which takes place during the laser‐dicing process is investigated by Shinya Ohmagari and colleagues in article number 2100846 . Herein, an appropriate measure to minimize the influence of laser dicing on SBD properties is proposed.