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Electroplated FePt Films for Micromechanical Magnetic Sensors
Author(s) -
Toda Masaya,
Xu Hao,
Ono Takahito
Publication year - 2021
Publication title -
physica status solidi (a)
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.532
H-Index - 104
eISSN - 1862-6319
pISSN - 1862-6300
DOI - 10.1002/pssa.202170026
Subject(s) - electroplating , annealing (glass) , materials science , electrode , ferromagnetism , optoelectronics , metallurgy , nanotechnology , composite material , condensed matter physics , chemistry , layer (electronics) , physics
Electroplated FePt Films Electroplated FePt ferromagnetic film is successfully processed, and Si resonators with the patterned FePt are fabricated. An Fe to Pt atomic ratio of approximately 1 is obtained at the working electrode potential of −0.76 ± 0.02 V for electroplating with following a hydrogen annealing process. More details can be found in article number 2000547 by Masaya Toda, Hao Xu, and Takahito Ono.