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Evaluation of pH Measurement Using Electron‐Beam‐Induced Current Detection
Author(s) -
Shibano Satoru,
Kawata Yoshimasa,
Inami Wataru
Publication year - 2021
Publication title -
physica status solidi (a)
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.532
H-Index - 104
eISSN - 1862-6319
pISSN - 1862-6300
DOI - 10.1002/pssa.202100147
Subject(s) - photocurrent , semiconductor , ion , electron , optoelectronics , materials science , ion beam , substrate (aquarium) , chemistry , ion current , proton , cathode ray , irradiation , capacitance , semiconductor device , analytical chemistry (journal) , electrode , nanotechnology , physics , oceanography , organic chemistry , quantum mechanics , chromatography , nuclear physics , geology , layer (electronics)
The study of biological functions requires measurements of changes in intracellular ion concentrations and their distribution. Ion‐sensitive field‐effect transistors and light‐addressable potentiometric sensors (LAPSs) operate on the basis of ion‐sensitive membranes and semiconductors that can measure the ion concentration around cells. In this study, the authors develop an ion sensors based on an operating principle similar to that of LAPSs. An electron beam rather than light is utilized. When a semiconductor is irradiated with an electron beam, electron–hole pairs are generated, and an induced current is produced with an amplitude that depends on the ion concentration. The bias voltage characteristics of the capacitance and photocurrent of the fabricated sensor substrate are evaluated and it is demonstrated that the proton concentration could be measured with an electron beam based on the same principle as in LAPSs.