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Advanced Characterization Methods for Electrical and Sensoric Components and Devices at the Micro and Nano Scales
Author(s) -
Sheremet Evgeniya,
Meszmer Peter,
Blaudeck Thomas,
Hartmann Susanne,
Wagner Christian,
Ma Bing,
Hermann Sascha,
Wunderle Bernhard,
Schulz Stefan E.,
Hietschold Michael,
Rodriguez Raul D.,
Zahn Dietrich R. T.
Publication year - 2019
Publication title -
physica status solidi (a)
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.532
H-Index - 104
eISSN - 1862-6319
pISSN - 1862-6300
DOI - 10.1002/pssa.201970061
Subject(s) - nanotechnology , characterization (materials science) , nano , microelectromechanical systems , nanoelectromechanical systems , materials science , scanning probe microscopy , nanoparticle , composite material , nanomedicine
Nanoanalysis Sensoric micro and nanosystems involve research from materials chemistry, solid‐state physics, and microelectromechanical engineering. In article number 1900106 , Evgeniya Sheremet, Peter Meszmer, Raul D. Rodriguez and co‐workers present recent advances in scanning probe microscopy applied to micro‐ and nanoelectromechanical systems.