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High Resolution Surface Metrology Using Microsphere‐Assisted Interference Microscopy (Phys. Status Solidi A 13∕2019)
Author(s) -
Montgomery Paul C.,
Lecler Sylvain,
LeongHoï Audrey,
Perrin Stéphane
Publication year - 2019
Publication title -
physica status solidi (a)
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.532
H-Index - 104
eISSN - 1862-6319
pISSN - 1862-6300
DOI - 10.1002/pssa.201970044
Subject(s) - metrology , materials science , surface metrology , optics , microsphere , resolution (logic) , interferometry , microscopy , interference microscopy , grating , optical microscope , interference (communication) , nanotechnology , surface finish , profilometer , optoelectronics , scanning electron microscope , physics , composite material , computer science , channel (broadcasting) , chemical engineering , artificial intelligence , engineering , computer network
Surface Metrology Microsphere‐assisted interference microscopy: The use of small glass microspheres placed on the sample for high resolution surface metrology in optical microscopy is reviewed. Cover: Enhanced lateral resolution observed in a wrapped phase image measured through à 24 μm diameter glass microsphere placed on a 300 nm pitch grating in a Linnik interferometer leading to the surface profile (dotted green line) and a measured depth of 40 nm; no features are observed with the objective alone. More details can be found in article number 1800761 by Paul Montgomery, Sylvain Lecler and co‐workers.