Thermolytic Deposition of MoS 2 Nanolayer for Si Solar Cell Applications

The thermolytic deposition of MoS 2 nanolayers for use in Si solar cells is investigated for which a thin MoS 2 nanolayer is grown on a crystalline Si substrate by the thermolysis method. The deposited MoS 2 nanolayer and Si substrate are annealed and show a transition from an amorphous to a crystalline phase as the annealing temperature increases. The MoS 2 (002) crystalline peak at 14.04° appears at an annealing temperature of 450 °C. The heterojunction interface of MoS 2 /np‐Si shows a mixed amorphous and crystalline phase. The Al/MoS 2 has better Ohmic contact compared with Al/Si. The MoS 2 nanolayer is introduced into the cell structure of a SiN x /a‐Si(n)/MoS 2 /np‐Si cell, the cell shows a photoconversion efficiency of 11.47%.