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Insulating Ag–Polyimide Hybrid Films with a Tunable Dielectric Constant
Author(s) -
Wiesinger Markus Klaus Diether,
Welzel Till,
Stutzmann Martin
Publication year - 2020
Publication title -
physica status solidi (a)
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.532
H-Index - 104
eISSN - 1862-6319
pISSN - 1862-6300
DOI - 10.1002/pssa.201900488
Subject(s) - dielectric , materials science , polyimide , capacitor , passivation , electric field , composite material , microstructure , optoelectronics , electronic engineering , electronic circuit , electrical engineering , layer (electronics) , voltage , physics , quantum mechanics , engineering
Herein, the production of nonpercolative hybrid insulating films with adjustable dielectric constant at low filler fractions is reported. These films might be useful to shape field distributions in passivation stacks or as dielectrics in passive components of integrated circuits such as capacitors. It is shown how such a system can be realized with commercially available materials and simple tools and how they can be significantly improved by adapting the processing techniques applied. The improved electric and dielectric properties are related to changes in the microstructure of the films caused by the different processing conditions. The experiments show that the films possess sufficiently stable properties from room temperature up to 150 °C, which enable them to be used in devices. Finally, a model is proposed for the dielectric breakdown of the films that gives a direction for the further improvement of such material systems.