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Development and Synchrotron‐Based Characterization of Al and Cr Nanostructures as Potential Calibration Samples for 3D Analytical Techniques (Phys. Status Solidi A 6∕2018)
Author(s) -
Dialameh Masoud,
Ferrarese Lupi Federico,
Hönicke Philipp,
Kayser Yves,
Beckhoff Burkhard,
Weimann Thomas,
Fleischmann Claudia,
Vandervorst Wilfried,
Dubček Pavo,
Pivac Branko,
Perego Michele,
Seguini Gabriele,
De Leo Natascia,
Boarino Luca
Publication year - 2018
Publication title -
physica status solidi (a)
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.532
H-Index - 104
eISSN - 1862-6319
pISSN - 1862-6300
DOI - 10.1002/pssa.201870010
Subject(s) - characterization (materials science) , calibration , synchrotron , materials science , nanostructure , nanotechnology , scale (ratio) , nanoscopic scale , analytical chemistry (journal) , optics , physics , chemistry , chromatography , quantum mechanics
Large‐scale sub‐20 nm regular pattern obtained by self‐assembly of di‐block copolymers. The combination of reference free grazing incidence X‐ray fluorescence (GIXRF) and GIXAS techniques enables a complete characterization of such a 3D system and provides a potential calibration sample for 3D analytical techniques. This is reported by Masoud Dialameh and co‐workers in article 1700866 .