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Potential of epitaxial silicon carbide microbeam resonators for chemical sensing
Author(s) -
Kermany Atieh R.,
Bennett James S.,
Valenzuela Victor M.,
Bowen Warwick P.,
Iacopi Francesca
Publication year - 2017
Publication title -
physica status solidi (a)
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.532
H-Index - 104
eISSN - 1862-6319
pISSN - 1862-6300
DOI - 10.1002/pssa.201770122
Subject(s) - microbeam , cantilever , silicon carbide , materials science , resonator , silicon , scanning electron microscope , epitaxy , sensitivity (control systems) , optoelectronics , nanotechnology , gravimetric analysis , optics , electronic engineering , composite material , chemistry , engineering , physics , layer (electronics) , organic chemistry
Molecular recognition sensors with high mass accuracy are in high demand, thus creating a unique opportunity for gravimetric sensing with microresonators such as bridges or cantilevers. Here, Kermany et al. (Article No. 1600437 ) review the parameters infl uencing the mass sensitivity and the approaches required to obtain the ultimate sensitivity with epitaxial SiC beam resonators. The image shows Scanning Electron Microscopy micrograph of released SiC cantilevers on silicon.