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Growth Mechanism of ZnO Thin Films Grown by Spray Pyrolysis Using Diethylzinc Solution
Author(s) -
Imai Masato,
Watanabe Marin,
Tominaga Himeka,
Yoshino Kenji,
Ogomi Yuhei,
Shen Qing,
Toyoda Taro,
Minemoto Takashi,
Hayase Shuzi
Publication year - 2018
Publication title -
physica status solidi (a)
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.532
H-Index - 104
eISSN - 1862-6319
pISSN - 1862-6300
DOI - 10.1002/pssa.201700406
Subject(s) - materials science , thin film , diethylzinc , deposition (geology) , crystallite , scanning electron microscope , spray pyrolysis , chemical engineering , pyrolysis , transmittance , composite material , nanotechnology , chemistry , organic chemistry , metallurgy , optoelectronics , catalysis , paleontology , sediment , engineering , biology , enantioselective synthesis
Non‐doped ZnO thin films are deposited on glass by spray pyrolysis using Diethylzinc diluted with diisopropyl ether. The droplet impacts are observed and the structural properties of films are studied as deposition temperature dependence. The shape of a droplet impacts changes from a hemisphere to a flat plane with increasing the deposition temperature. The images of cross sectional transmittance electron microscopy show granular non‐crystalline for RT (room temperature) sample and columnar polycrystalline for 150 °C sample as shown on the right‐side. The growth mechanism of ZnO thin films is discussed by considering the relationship between the shape of droplet impacts and the morphology of the deposited films. Also, the presence of the crystal formed by precursor is suggested for the films deposited at lower temperature.